MPXAZ6115A Datasheet, PDF (1/12 Pages) Motorola, Inc – Media Resistant and High Temperature Accuracy Integrated Silicon Pressure Sensor

Freescale Semiconductor, Inc.
MOTOROLA
SEMICONDUCTOR TECHNICAL DATA
Order Number: MPXAZ6115A
Rev. 1, 06/2004
Media Resistant and
High Temperature Accuracy
Integrated Silicon Pressure Sensor
for Measuring Absolute Pressure,
MPXAZ6115A
MPXHZ6115A
SERIES
On-Chip Signal Conditioned,
Temperature Compensated
and Calibrated
Motorola's MPXAZ6115A series sensor integrates on-chip, bipolar op amp
circuitry and thin film resistor networks to provide a high output signal and
temperature compensation. The sensor's packaging has been designed to provide
resistance to high humidity conditions as well as common automotive media. The
small form factor and high reliability of on-chip integration make the Motorola
pressure sensor a logical and economical choice for the system designer.
INTEGRATED
PRESSURE SENSOR
15 to 115 kPa (2.2 to 16.7 psi)
0.2 to 4.8 Volts Output
SMALL OUTLINE PACKAGE
The MPXAZ6115A series piezoresistive transducer is a state-of-the-art,
monolithic, signal conditioned, silicon pressure sensor. This sensor combines
advanced micromachining techniques, thin film metallization, and bipolar
semiconductor processing to provide an accurate, high level analog output signal
that is proportional to applied pressure.
MPXAZ6115A6U
CASE 482-01
Figure 1 shows a block diagram of the internal circuitry integrated on a pressure
sensor chip.
Features
• Resistant to High Humidity and Common Automotive Media
• Improved Accuracy at High Temperature
• 1.5% Maximum Error over 0° to 85°C
• Ideally suited for Microprocessor or Microcontroller-Based Systems
• Temperature Compensated from -40° to +125°C
• Durable Thermoplastic (PPS) Surface Mount Package
Application Examples
• Aviation Altimeters
• Industrial Controls
• Engine Control/Manifold Absolute Pressure (MAP)
• Weather Station and Weather Reporting Devices
VS
MPXAZ6115AC6U
CASE 482A-01
PIN NUMBER
1
N/C
5
N/C
2
V_S
6
N/C
3
Gnd
7
N/C
4
V_out
8
N/C
NOTE:
Pins 1, 5, 6, 7, and 8 are internal
device connections. Do not
connect to external circuitry or
ground. Pin 1 is denoted by the
notch in the lead.
SUPER SMALL OUTLINE PACKAGE
SENSING
ELEMENT
THIN FILM
GAIN STAGE #2
TEMPERATURE
AND
COMPENSATION
AND
GROUND
REFERENCE
Vout
GAIN STAGE #1
SHIFT CIRCUITRY
PINS 1, 5, 6, 7 AND 8 ARE NO CONNECTS
GND
Figure 1. Fully Integrated Pressure Sensor
Schematic
MPXHZ6115A6U
CASE 1317-04
MPXAZ6115AC6U
CASE 1317A-03
© Motorola, Inc. 2004
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Go to: www.freescale.com