MLX90210_12 Datasheet, PDF (2/3 Pages) Melexis Microelectronic Systems – Pressure Sensor /C

MLX90210
Pressure Sensor /C
MLX90210 Electrical Specifications
DC Operating Parameters T_A = 2SC, V_DD = SV (note 3), Pressure = 1.0 Bar full scale.
Parameter
Symbol
Min Typ Max Units
Excitation vo tage
Zero Pressure Offset VOFF
Sensitivity
S
TC of the Sensitivity
TCS
Bridge Resistance
RBR
Burst Pressure
Operating Temp
Storage Temp (2)
0 5 12 V
-20 0
+20 mV
15 30 45 mV/V/bar
-0.17 -0.21 -0.26 %/°C
360 400 450 Ohm
2 Bar
0
70 °C
-55
150 °C
MLX90210 Mechanical Dimensions (4)
Membrane Size
Chip Thickness
Chip Size
0.81mm x 0.81mm
0.61mm
1.90mm x 1.90mm
Notes:
1) Temperature range refers to operation and deposit in an inert environment
2) Temperature range refers to operation and deposit in an inert environment
3) To prevent measurement errors, measure above 3V VDD in impulse mode
4) Tolerance of 10% unless otherwise specified.
3901090210
Rev 004
Page 2 of 3
Data Sheet
May/12