B1520A Datasheet, PDF (18/36 Pages) Keysight Technologies – Semiconductor Device Analyzer

18 | Keysight | B1500A Semiconductor Device Analyzer - Data Sheet
Measurement accuracy
Impedance measurement error is given by adding the following
additional error E_e to the MFCMU measurement error.
E_e = ±(A + Z_S/|Z_X| + Y_O|Z_X|) x 100 (%)
Z_X: Impedance measurement value (Ω)
A: 0.05 % (direct docking) or 0.1 % (indirect docking)
Z_S: 500 + 500 x f (mΩ)
Y_O: 1 + 1000 x f/100 (nS) (direct docking, x2 for indirect docking)
Note: f is frequency in MHz.
When the measurement terminals are extended by using the
measurement cable, the measurement accuracy is applied to the
data measured after performing the open/short/load correction
at the DUT side cable end.
Note: The error is specified under the following conditions:
Temperature: 23 °C ±5 °C
Integration time: 1 PLC or 16 PLC
HV-SPGU (high voltage semiconductor
pulse generator unit) Module Specification
Specifications
Number of output channels:
2 channels per module
Modes: pulse, constant, and freerun
Standard pulse mode:
–– Two level pulse
–– Three level pulse per one channel
–– Pulse period: 20 ns to 10 s
Delay range: 0 s to 9.99 s
Delay resolution: 2.5 ns (minimum)
Output count: 1 to 1,000,000
Voltage monitor minimum sampling period: 5 μs
Trigger output:
Level: TTL
Timing: Synchronized with pulse period
Trigger width:
Pulse period x 1/2 (pulse period ≤ 10 µs)
Maximum 5 µs (pulse period > 10 µs)