B1510A Datasheet, PDF (13/36 Pages) Keysight Technologies – Semiconductor Device Analyzer

13 | Keysight | B1500A Semiconductor Device Analyzer - Data Sheet
Supplemental Characteristics
Current compliance setting accuracy
(for opposite polarity):
For HPSMU, MPSMU, and HRSMU:
For 1 pA to 10 nA ranges: ± (setting accuracy + 12 % of range)
For 100 nA to 1 A ranges: ± (setting accuracy + 2.5 % of range)
For MCSMU: ± (setting accuracy + 2.5 % of range)
Maximum load capacitance:
For HPSMU, MPSMU, and HRSMU:
1 pA to 10 nA ranges: 1000 pF
100 nA to 10 mA ranges: 10 nF
100 mA and 1 A ranges: 100 μF
For MCSMU:
10 μA to 10 mA range : 12 nF
100 mA to 1 A range : 100 μF
SMU pulse setting accuracy
(fixed measurement range):
For HPSMU, MPSMU, and HRSMU:
Width: ±0.5% ± 50 μs
Period: ±0.5% ± 100 μs
For MCSMU:
Width: ±0.1% ± 2 μs
Period: ±0.1% ± 100 μs
Minimum pulse measurement time:
16 μs (HPSMU, MPSMU, and HRSMU)
2 μs (MCSMU)
Voltage source output resistance:
(Force line, non-Kelvin connection)
0.2 Ω (HPSMU)
0.3 Ω (MPSMU, HRSMU)
Voltage measurement input resistance:
≥ 10¹³ Ω (HPSMU, MPSMU, and HRSMU)
≥ 10⁹ Ω (MCSMU, ≤ 1 A)
Current source output resistance:
≥ 10¹³ Ω (HPSMU, MPSMU, and HRSMU)
≥ 10⁹ Ω (MCSMU, ≤ 1 A)
Maximum allowable cable resistance:
(Kelvin connection)
For HPSMU, MPSMU, and HRSMU:
Sense: 10 Ω
Force: 10 Ω (≤ 100 mA),1.5 Ω (>100 mA)
For MCSMU
Sense: 10 Ω
Force : 1 Ω
between High and Low
Maximum guard capacitance:
900 pF (HPSMU, MPSMU, and HRSMU)
660 pF (HRSMU/MPSMU with ASU)
Maximum shield capacitance:
5000 pF (HPSMU, MPSMU, and HRSMU)
3500 pF (HRSMU/MPSMU with ASU)
Noise characteristics:
For HPSMU, MPSMU, and HRSMU
(filter ON)
Voltage source: 0.01% of V range (rms.)
Current source: 0.1% of I range (rms.)
For MCSMU
Voltage/Current source: 200 mV (0 to peak) max
Overshoot (filter ON):
For HPSMU MPSMU, and HRSMU
Voltage source: 0.03% of V range
Current source: 1% of I range
For MCSMU
Voltage/Current source: 10% of range
Range switching transient noise:
For HPSMU, MPSMU, and HRSMU (filter ON):
Voltage ranging: 250 mV
Current ranging: 70 mV
For MCSMU:
Voltage ranging: 250 mV
Current ranging: 70 mV
Maximum guard offset voltage:
±1 mV (HPSMU)
±3 mV (MPSMU, HRSMU)
±4.2 mV (HRSMU/MPSMU with ASU, Iout≤100 μA)
Maximum allowable inductance:
Force 3 µH with Low Force as shield (MCSMU)
Maximum slew rate:
0.2 V/μs (HPSMU, MPSMU, and HRSMU)
1 V/μs (MCSMU)
Maximum DC floating voltage:
±200 V DC between low force and common (MCSMU)