MTX2-02G Datasheet, PDF (1/4 Pages) JL World Company Limited. – Dual Axis Accelerometer

1907 Westlands Centre, 20 Westlands Road, Quarry Bay, Hong Kong
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Website : www.jlworld.com
Page 1 of 4
060220-A 3
MTX2-02G
Dual Axis Accelerometer – Low g
Dual Axis Silicon
Accelerometer Die
The MTX2-02G series capacitive silicon
accelerometer sensors are manufactured in class
10 clean room using state of the art CMOS and
bulk micro-machining capabilities. They are
manufactured in six inched wafers, utilizing DRIE
techniques and patented processes.
An applied force or acceleration (including gravity)
causes a capacitance shift in a differential
capacitor, which is converted to a pulse density
modulation by an integrated ASIC. The XY
sensing element is a differential capacitor
fabricated in single crystal silicon with a high
aspect ratio thereby offering excellent
performance in sensitivity and linearity.
The sensing element is enclosed in a hermetic
wafer-level package using wafer to wafer bonding.
This allows it to be assembled in different types of
packaging including low cost over-molded plastic
packages.
Dies are fully probed and inspected and can be
shipped in waffle pack.
FEATURES
− Excellent accuracy over 2g range
− Good temperature performance
− Low cost design
− Capacitive, high performance
− 100% factory tested
− High volume manufacturing
− Patented process
THE MAIN FIELD OF APPLICATIONS
− Acceleration Measurement
− Vibration measurement
− Inclination Measurement
Preliminary