MTX1-50G Datasheet, PDF (1/4 Pages) JL World Company Limited. – Single Axis Acce lerometer - 50 g

1907 Westlands Centre, 20 Westlands Road, Quarry Bay, Hong Kong
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Website : www.jlworld.com
MTX1-50G
Single Axis Accelerometer – 50 g
Page 1 of 4
060472-A2
Single Axis Silicon Accelerometer Die
The MTX1-50G series capacitive silicon
accelerometer sensors are manufactured in class
10 clean room using state of the art CMOS and
bulk micro-machining capabilities. They are
manufactured in six inched wafers, utilizing DRIE
techniques and patented processes.
An applied force or acceleration (including gravity)
causes a capacitance shift in a differential
capacitor, which is converted to a pulse density
modulation by an integrated ASIC. The sensing
element is a differential capacitor fabricated in
single crystal silicon with a high aspect ratio
thereby offering excellent performance in
sensitivity and linearity.
The sensing element is enclosed in a hermetic
wafer-level package using wafer to wafer bonding.
This allows it to be assembled in different types of
packaging including low cost over-molded plastic
packages.
Dies are fully probed and inspected and can be
shipped in waffle pack.
FEATURES
• Excellent accuracy over 50g range
• Good temperature performance
• Low cost design
• Capacitive, high performance
• 100% factory tested
• High volume manufacturing
• Patented process
THE MAIN FIELD OF APPLICATIONS
Acceleration Measurement
Vibration measurement
Inclination Measurement
Document #: DS-SDEV-MTX1-50G Rev A