MS7930 Datasheet, PDF (1/5 Pages) Intersema Sensoric SA – PRESSURE SENSOR DIE (0-30 BAR)

MS7930
PRESSURE SENSOR DIE (0-30 BAR)
• 0 to 3000 kPa range (30 bar or 435 PSI)
• Absolute/differential pressure sensors
• High linearity, small size
• RoHS-compatible & Pb-free¹
DESCRIPTION
The sensor element of the MS7930 consists of a silicon micro-machined membrane. Implanted resistors make
use of the piezo-resistive effect to sense the membrane deflection and transform it in an electrical signal. This
sensor, which has outstanding linearity and span values, is available in various configurations. The absolute
pressure sensor employs a sealed vacuum reference cavity underneath the membrane. The Pyrex glass wafer
used for this sealing has a thickness of 0.2 mm (MS7930-A_0.2) or 0.5 mm (MS7930-A_0.5). There are two
gauge versions available: one with a drilled Pyrex glass (MS7930-D) and the other without Pyrex glass
(MS7930-S).
FEATURES
• Uncompensated pressure sensor die
• Output span 150mV @ 5V
• Temperature range -40°…+125°C
• Linearity 0.05% (typical)
• Very small die size 1.72 x 1.58 mm (MS7930-A)
• Low cost, high reliability
APPLICATION
• Absolute pressure sensor systems
• Differential/gauge pressure sensor systems
• Engine controls
• Dive computers
ELECTRICAL CONNECTIONS
Positive output for pressure applied topside
Vs+
EPI
Out+
Out-
Vs+ : Supply voltage of Wheatstone bridge
Epi : Connection of epitaxial layer (membrane)
Out- : Negative output
Out+ : Positive output
GND1 : Ground
GND2 : Ground
GND1 GND2
1 _{The European RoHS directive 2002/95/EC (Restriction of the use of certain Hazardous Substances in electrical and electronic equipment)}
bans the use of lead, mercury, cadmium, hexavalent chromium and polybrominated biphenyls (PBB) or polybrominated diphenyl ethers
(PBDE).
DA7930_000.doc
March 9, 2009
1/5
000079301500
ECN 1205