MS7912 Datasheet, PDF (1/4 Pages) Intersema Sensoric SA – PRESSURE SENSOR DIE (0-12 BAR)

MS7912
PRESSURE SENSOR DIE (0-12 BAR)
• 0 to 1200 kPa range (12 bar or 174 PSI)
• Absolute/differential pressure sensors
• High linearity, small size
• RoHS-compatible & Pb-free¹
DESCRIPTION
The sensor element of the MS7912 consists of a small silicon micro-machined membrane with a Pyrex glass
mounted under vacuum. Implanted resistors make use of the piezo-resistive effect. The absolute pressure
sensor (MS7912A) carries a sealed vacuum reference cavity underneath the membrane whereas the differential
sensor (MS7912D) has a hole in the Pyrex glass at the backside of the sensor.
FEATURES
• Uncompensated pressure sensor die
• Output Span 150mV @ 5V
• Temperature Range -40°…+125°C
• Linearity 0.05% (typical)
• Small Die Size 1.72 x 1.58mm
• Low Cost, High reliability
APPLICATION
• For absolute or differential pressure sensor systems
• Engine controls
• Dive computers
ELECTRICAL CONNECTIONS
Positive output for pressure applied topside
Vs+
EPI
Out+
Out-
GND1 GND2
Vs+ : Supply voltage of Wheatstone bridge
Epi : Connection of epitaxial layer (membrane)
Out- : Negative output
Out+ : Positive output
GND1 : Ground
GND2 : Ground
1 _{The European RoHS directive 2002/95/EC (Restriction of the use of certain Hazardous Substances in electrical and electronic equipment)}
bans the use of lead, mercury, cadmium, hexavalent chromium and polybrominated biphenyls (PBB) or polybrominated diphenyl ethers
(PBDE).
DA7912_003.doc
May 05th, 2005
1/4
00007912636
ECN 743