MS79005 Datasheet, PDF (1/5 Pages) Intersema Sensoric SA – PRESSURE SENSOR DIE (0-0.5 BAR)

MS79005
PRESSURE SENSOR DIE (0-0.5 BAR)
• 0 to 50 kPa range (500 mbar or 7.5 PSI)
• Absolute/differential pressure sensors
• RoHS-compatible & Pb-free¹
DESCRIPTION
The sensor element of the MS79005 consists of a silicon micro-machined membrane. Implanted resistors make
use of the piezo-resistive effect to sense the membrane deflection and transform it in an electrical signal. This
sensor, which has outstanding linearity and span values, is available in various configurations. The absolute
pressure sensor employs a sealed vacuum reference cavity underneath the membrane. The Pyrex glass wafer
used for this sealing has a thickness of 0.2 mm (MS79005-A_0.2) or 0.5 mm (MS79005-A_0.5). Two gauge
versions available: one with a drilled Pyrex glass (MS79005-D) and the other without Pyrex glass (MS79005-S).
FEATURES
• Uncompensated pressure sensor die
• Output Span 150mV @ 5V
• Temperature Range -40°…+125°C
• Linearity 0.05% (typical)
• Very small Die Size 1.78 x 1.78mm (MS79005-A)
• Low Cost, High reliability
APPLICATION
• For absolute or differential pressure sensor systems
• Variometers
ELECTRICAL CONNECTIONS
Positive output for pressure applied topside
Vs+ / EPI
Out+
Out-
R5+
R6+
GND1 GND2
R5-
R6-
R5 and R6 are
placed on bulk
Vs+ : Supply voltage of Wheatstone bridge
Epi : Connection of epitaxial layer (membrane)
Out- : Negative output
Out+ : Positive output
GND1 : Ground
GND2 : Ground
R5+ : Reference Resistor 5: positive access
R5- : Reference Resistor 5: negative access
R6+ : Reference Resistor 6: positive access
R6- : Reference Resistor 6: negative access
1 _{The European RoHS directive 2002/95/EC (Restriction of the use of certain Hazardous Substances in electrical and electronic equipment)}
bans the use of lead, mercury, cadmium, hexavalent chromium and polybrominated biphenyls (PBB) or polybrominated diphenyl ethers
(PBDE).
DA79005_000.doc
May 07, 2009
1/5
000790051447
ECN 1186