MS767 Datasheet, PDF (1/4 Pages) Intersema Sensoric SA – PRESSURE SENSOR DIE (0-7 BAR)

MS767
PRESSURE SENSOR DIE (0-7 BAR)
• 0 to 700 kPa range (7 bar or 102 PSI)
• Absolute pressure sensors
• RoHS-compatible & Pb-free¹
DESCRIPTION
The sensor element of the MS767 consists of a silicon micro-machined membrane with a Pyrex glass mounted
under vacuum. Implanted resistors make use of the piezo-resistive effect. The MS767 is available as an
absolute sensor (MS767A) where a sealed vacuum cavity underneath the membrane is used as reference
pressure.
FEATURES
• Uncompensated pressure sensor die
• Output Span 392mV @ 5V
• Temperature Range -40°…+125°C
• Linearity 0.15% (typical)
• Die Size 1.72 x 1.58mm
• Low Cost, High reliability
APPLICATION
• For absolute pressure sensor systems
• Tire pressure measurements
• Electronic scales
ELECTRICAL CONNECTIONS
Positive output for pressure applied topside
Vs+
EPI
Out+
Out-
GND1 GND2
Vs+ : Supply voltage of Wheatstone bridge
Epi : Connection of epitaxial layer (membrane)
Out- : Negative output
Out+ : Positive output
GND1 : Ground
GND2 : Ground
1 _{The European RoHS directive 2002/95/EC (Restriction of the use of certain Hazardous Substances in electrical and electronic equipment) bans}
the use of lead, mercury, cadmium, hexavalent chromium and polybrominated biphenyls (PBB) or polybrominated diphenyl ethers (PBDE).
DA767_007.doc
August 30th, 2005
1/4
00000767356
ECN 797