MS765 Datasheet, PDF (1/6 Pages) Intersema Sensoric SA – PRESSURE SENSOR DIE (0-0.5 BAR)

MS765
PRESSURE SENSOR DIE (0-0.5 BAR)
• 0 to 50 kPa range (0.5 bar or 7.25 PSI)
• Absolute/differential pressure sensors
• Medical/industrial applications
• RoHS-compatible & Pb-free¹
DESCRIPTION
The sensor element of the MS765 consists of a silicon micro-machined membrane. Implanted resistors make
use of the piezo-resistive effect to sense the membrane deflection and transform it in an electrical signal. This
sensor, which has outstanding span values, is available in various configurations. The absolute pressure sensor
employs a sealed vacuum reference cavity underneath the membrane. The Pyrex glass wafer used for this
sealing has a thickness of 0.2 mm (MS765-A_0.2) or 0.5 mm (MS765-A_0.5). There are two gauge versions
available: one with a drilled Pyrex glass (MS765-D) and the other without Pyrex glass (MS765-S).
FEATURES
• Uncompensated pressure sensor die
• Output Span 170 mV @ 500 mbar & 5V
• Temperature Range -40°…+125°C
• Linearity 0.05% (typical)
• Small Die Size 1.96 x 2.10 mm (MS765-A)
• Low Cost, High reliability
APPLICATION
• Absolute/Differential pressure sensor systems
• Variometers
• Liquid level control
• Blood pressure meters
• Industrial applications
ELECTRICAL CONNECTIONS
Positive output for pressure applied topside
Vs+
EPI
Out+
Out-
Vs+ : Supply voltage of Wheatstone bridge
Epi : Connection of epitaxial layer (membrane)
Out- : Negative output
Out+ : Positive output
GND1 : Ground
GND2 : Ground
GND1 GND2
1 _{The European RoHS directive 2002/95/EC (Restriction of the use of certain Hazardous Substances in electrical and electronic equipment)}
bans the use of lead, mercury, cadmium, hexavalent chromium and polybrominated biphenyls (PBB) or polybrominated diphenyl ethers
(PBDE).
DA765_000.doc
March 19, 2009
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ECN 1186