MS761 Datasheet, PDF (1/4 Pages) Intersema Sensoric SA – PRESSURE SENSOR DIE (0-1 BAR)

MS761
PRESSURE SENSOR DIE (0-1 BAR)
• 0 to 100 kPa bar range (1 bar or 14.5 PSI)
• High Sensitivity
• ROHS-Compatible & Pb-free¹
DESCRIPTION
The sensor element of the MS761A consists of a silicon micro-machined membrane with a Pyrex glass mounted
under vacuum. Implanted resistors make use of the piezo-resistive effect. The absolute pressure sensor
(MS761-A) carries a sealed vacuum reference cavity underneath the membrane whereas the differential sensor
(S-761-D) has a hole in the Pyrex glass at the backside of the sensor.
FEATURES
• Uncompensated pressure sensor die
• High Sensitivity: Output Span 240 mV @ 5V
• Temperature Range -40°C …+ 125°C
• Linearity 0.15 % (typical)
• Small Die Size 2.00 X 1.86 mm
• Low cost, High reliability
APPLICATION
• For high resolution absolute sensor systems
• Engine Controls
• Barometers, Altimeters, Variometers
ELECTRICAL CONNECTIONS
Positive output for pressure applied topside
Vs+
EPI
Out+
Out-
GND1 GND2
Vs+ : Supply voltage of Wheatstone bridge
Epi : Connection of epitaxial layer (membrane)
Out- : Negative output
Out+ : Positive output
GND1 : Ground
GND2 : Ground
1 _{The European RoHS directive 2002/95/EC (Restriction of the use of certain Hazardous Substances in electrical and electronic equipment)}
bans the use of lead, mercury, cadmium, hexavalent chromium and polybrominated biphenyls (PBB) or polybrominated diphenyl ethers
(PBDE).
DA761_002.doc
May 9, 2007
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