MS7310D Datasheet, PDF (1/4 Pages) Intersema Sensoric SA – LOW PRESSURE SENSOR DIE (0 to 10 kPa)

MS7310D LOW PRESSURE SENSOR DIE (0 to 10 kPa)
• 0 to 10 kPa (100 mbar or 1.45 PSI)
• Uncompensated differential pressure sensor die
• Piezoresistive silicon micromachined sensor
• High output signal 110 mV
• Small size
• RoHS-compatible & Pb-free¹
DESCRIPTION
The MS7310D pressure sensor die is designed for low pressure sensor systems with the highest demands on
resolution and accuracy. Its sensor element consists of a silicon micro-machined membrane bonded on a
Pyrex™ glass support. The sensor signal is proportional to the pressure difference between back and front side
of the membrane. The pressure is sensed by four implanted piezoresistors, giving a large output signal.
FEATURES
• Uncompensated differential pressure sensor die
• Output span 110 mV @ 5 V
• Temperature range -40°C to +125 °C
• Typical linearity 0.35% (10kPa) or 0.1% (2kPa)
• Die size 2.45 mm x 2.45 mm
• Low cost, high reliability, low drift
• High pressure burst capability (600 kPa)
APPLICATION
• Washing machines
• Level indicators
• Industrial controls
• Leak detection
ELECTRICAL CONNECTIONS
Positive output for pressure applied topside
Vs+
EPI
Out+
Out-
Vs+ : Supply voltage of Wheatstone bridge
Epi : Connection of epitaxial layer (membrane)
Out- : Negative output
Out+ : Positive output
GND1 : Ground
GND2 : Ground
GND1 GND2
1 _{The European RoHS directive 2002/95/EC (Restriction of the use of certain Hazardous Substances in electrical and electronic equipment)}
bans the use of lead, mercury, cadmium, hexavalent chromium and polybrominated biphenyls (PBB) or polybrominated diphenyl ethers
(PBDE).
DA7310D_004.doc
March 10, 2006
1/4
00007310559
ECN836