MS7212 Datasheet, PDF (1/4 Pages) Intersema Sensoric SA – PRESSURE SENSOR DIE (0-12 BAR) FOR HARSH ENVIRONMENT

MS7212
PRESSURE SENSOR DIE (0-12 BAR)
FOR HARSH ENVIRONMENT
• 0 to 1200 kPa range (12 bar or 174 PSI)
• Absolute pressure sensors
• Hermetic sensor
• RoHS-compatible & Pb-free¹
DESCRIPTION
The MS7212 is an absolute silicon micro-machined pressure sensor for harsh environment. A vacuum reference
cavity is sealed on top of the sensitive silicon membrane by the anodic bonding of a Pyrex™ cap. The pressure,
applied on the backside, is converted in electrical signal by piezo-resistors implanted in the silicon membrane.
To improve the sensor stability, a drilled Pyrex™ is bonded on the backside. As the pressure port consists of
Pyrex™ and silicon, both stable in most of the chemicals, the MS7212 is suitable for media-resistive
applications.
FEATURES
• Media resistive pressure sensor die
• Output Span 150mV @ 5 V
• Temperature Range -40°…+125°C
• Linearity 0.05% (typical)
• Die Size 1.63 x 1.95 mm²
• Low Cost, High reliability
APPLICATION
• Harsh environments
• Absolute pressure sensor systems
• Braking systems
• Tire pressure
• Engine controls
• Diving computers
ELECTRICAL CONNECTIONS
Positive output for pressure applied topside
Vs+
EPI
Vs+ : Supply voltage of Wheatstone bridge
Epi : Connection of epitaxial layer (membrane)
Out- : Negative output
Out+ : Positive output
GND1 : Ground
GND2 : Ground
Out+
Out-
GND1 GND2
1 _{The European RoHS directive 2002/95/EC (Restriction of the use of certain Hazardous Substances in electrical and electronic equipment)}
bans the use of lead, mercury, cadmium, hexavalent chromium and polybrominated biphenyls (PBB) or polybrominated diphenyl ethers
(PBDE).
DA7212_003.doc
December 4, 2006
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00007212583
ECN 743