MS7202-A2 Datasheet, PDF (1/5 Pages) Intersema Sensoric SA – PRESSURE SENSOR DIE (0-2 BAR) FOR HARSH ENVIRONMENT

MS7202-A2
PRESSURE SENSOR DIE (0-2 BAR)
FOR HARSH ENVIRONMENT
• 0 to 200 kPa range (2 bar or 29 PSI)
• Uncompensated absolute pressure sensor die
• Piezoresistive silicon micromachined sensor
• Hermetic sensor, temperature up to 150°C
• Pads on one side
• RoHS-compatible & Pb-free¹
DESCRIPTION
The MS7202-A2 is an absolute silicon micro-machined pressure sensor for harsh environment, with the pads on
one side. A vacuum reference cavity is sealed on top of the sensitive silicon membrane by the anodic bonding of
a glass cap. The pressure, applied on the backside, is converted in electrical signal by piezo-resistors implanted
in the silicon membrane. To improve the sensor stability, a drilled glass is bonded on the backside. As the
pressure port consists of glass and silicon, both stable in most of the chemicals, the MS7202-A2 is suitable for
media-resistive applications.
FEATURES
• Media resistive pressure sensor die
• Typical output Span 150mV @ 5 V
• Temperature range -40°…+150°C
• Linearity 0.15% (typical)
• Die size 1.35 x 1.79 mm²
• Low cost, high reliability & stability
APPLICATION
• Harsh environments
• Absolute pressure sensor systems
ELECTRICAL CONNECTIONS
Pin Symbol
Description
1 EPI / I diode (-) Epi contact / Cathode of diode (n)
2 Vs+ / I diode (+) Supply voltage / Anode of diode (p)
3
Out+
Positive output*
4
GND
Ground
5
Out-
Negative output*
*Positive output for pressure applied backside
1 _{The European RoHS directive 2002/95/EC (Restriction of the use of certain Hazardous Substances in electrical and electronic equipment)}
bans the use of lead, mercury, cadmium, hexavalent chromium and polybrominated biphenyls (PBB) or polybrominated diphenyl ethers
(PBDE).
DA7202-A2_000.doc
April 24, 2009
1/5
000072021501
ECN 1209