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MS52XX Datasheet, PDF (1/8 Pages) Intersema Sensoric SA – SMD PRESSURE SENSOR
MS52XX (RoHS*)
SMD PRESSURE SENSOR
• 1 and 12 bar absolute pressure range
• Uncompensated
• Piezoresistive silicon micromachined sensor
• Surface mount 7.6 x 7.6 mm
• Low noise, high sensitivity, high linearity
• RoHS-compatible & Pb-free*
DESCRIPTION
The MS52XX SMD pressure sensor series is designed for pressure sensor systems with highest demands on
resolution and accuracy. The device consists of a silicon micromachined pressure sensor die mounted on a 7.6 x
7.6 mm ceramic carrier protected by a metal cap. The MS52XX can be delivered in a highly sensitive version
giving a maximal output voltage or in a highly linear version giving a linear output voltage directly proportional to
the applied pressure.
Full Scale
Pressure
1 bar
12 bar
High Sensitivity Version
Product Code Full Scale Span / Linearity
MS5201-AN
240 mV / ±0.2% FS
High Linearity Versions
Product Code Full Scale Span / Linearity
MS5201-BN
150 mV / ±0.05% FS
MS5212-BM
150 mV / ±0.05% FS
FEATURES
• Low cost SMD ceramic package
• High reliability, low drift
APPLICATIONS
• Absolute pressure sensor systems
• High resolution altimeters, variometers
• Barometers
PIN CONFIGURATION
• -40°C to +125 °C operation range
• Optional: Gel protection against humidity and water
• Engine controls
• Diver’s computers
• Tire pressure
3: VS+
4: OUT+
1: OUT-
2: GND
* The European RoHS directive 2002/95/EC (Restriction of the use of certain Hazardous Substances in electrical and electronic equipment)
bans the use of lead, mercury, cadmium, hexavalent chromium and polybrominated biphenyls (PBB) or polybrominated diphenyl ethers (PBDE).
DA52XXYZ_012
December 19, 2005
1
000052xx223 ECN0828