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C3017 Datasheet, PDF (1/2 Pages) IMP, Inc – 10 Volt Analog Mixed Mode | |||
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®
ISO 9001 Registered
Process C3017
CMOS 3µm
10 Volt Analog Mixed Mode
Electrical Characteristics
N-Channel Transistor
Threshold Voltage
Body Factor
Conduction Factor
Effective Channel Length
Width Encroachment
Punch Through Voltage
Poly Field Threshold Voltage
Symbol
VTN
γN
βN
LeffN
âWN
BVDSSN
VTFP(N)
Minimum
0.6
42
2.85
12
12
Typical
0.8
0.6
47
3.2
0.7
T=25oC Unless otherwise noted
Maximum
1.0
52
3.55
Unit
V
V1/2
µA/V2
µm
µm
V
V
Comments
100x4µm
100x4µm
100x100µm
100x4µm
Per side
P-Channel Transistor
Threshold Voltage
Body Factor
Conduction Factor
Effective Channel Length
Width Encroachment
Punch Through Voltage
Poly Field Threshold Voltage
Symbol
VTP
γP
βP
LeffP
âWP
BVDSSP
VTFP(P)
Minimum
â0.6
13
2.85
â12
â12
Typical
â0.8
0.55
15
3.2
0.9
Maximum
â1.0
19
3.55
Unit
V
V1/2
µA/V2
µm
µm
V
V
Comments
100x4µm
100x4µm
100x100µm
100x4µm
Per side
Diffusion & Thin Films
Well (field) Sheet Resistance
N+ Sheet Resistance
N+ Junction Depth
P+ Sheet Resistance
P+ Junction Depth
Gate Oxide Thickness
Interpoly Oxide Thickness
Gate Poly Sheet Resistance
Bottom Poly Sheet Res.
Metal-1 Sheet Resistance
Metal-2 Sheet Resistance
Passivation Thickness
Symbol
ÏP-well(f)
ÏN+
xjN+
ÏP+
xjP+
TGOX
TP1P2
ÏPOLY1
ÏPOLY2
ÏM1
ÏM2
TPASS
Minimum
3.2
16
50
44
15
15
Typical
4.8
21
0.8
80
0.7
48
60
22
22
50
30
200+900
Maximum
6.5
27
100
52
30
30
Unit
Kâ¦/
â¦/
µm
â¦/
µm
nm
nm
â¦/
â¦/
mâ¦/
mâ¦/
nm
Comments
P-well
oxide+nit.
Capacitance
Gate Oxide
Metal-1 to Poly-1
Metal-1 to Silicon
Metal-2 to Metal-1
Poly-1 to Poly-2
Symbol
COX
CM1P
CM1S
CMM
CP1P2
Minimum
0.66
0.26
0.033
0.51
Typical
0.72
0.0523
0.30
0.0384
0.57
Maximum
0.78
0.34
0.041
0.63
Unit
fF/µm2
fF/µm2
fF/µm2
fF/µm2
fF/µm2
Comments
© IMP, Inc.
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