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C3014 Datasheet, PDF (1/2 Pages) IMP, Inc – CMOS 3mm 5 Volt Single Metal Analog | |||
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®
ISO 9001 Registered
Process C3014
CMOS 3µm
5 Volt Single Metal Analog
Electrical Characteristics
N-Channel Transistor
Threshold Voltage
Body Factor
Conduction Factor
Effective Channel Length
Width Encroachment
Punch Through Voltage
Poly Field Threshold Voltage
Symbol
VTN
γN
βN
LeffN
âWN
BVDSSN
VTFP(N)
Minimum
0.5
42
2.0
12
12
Typical
0.65
0.6
47
2.3
0.7
T=25oC Unless otherwise noted
Maximum
0.8
52
2.6
Unit
V
V1/2
µA/V2
µm
µm
V
V
Comments
100x3µm
100x3µm
100x100µm
100x3µm
Per side
P-Channel Transistor
Threshold Voltage
Body Factor
Conduction Factor
Effective Channel Length
Width Encroachment
Punch Through Voltage
Poly Field Threshold Voltage
Symbol
VTP
γP
βP
LeffP
âWP
BVDSSP
VTFP(P)
Minimum
â0.5
13
2.85
â12
â12
Typical
0.65
0.55
15
3.2
0.9
Maximum
â0.8
19
3.55
Unit
V
V1/2
µA/V2
µm
µm
V
V
Comments
100x3µm
100x3µm
100x100µm
100x3µm
Per side
Diffusion & Thin Films
Well (field) Sheet Resistance
N+ Sheet Resistance
N+ Junction Depth
P+ Sheet Resistance
P+ Junction Depth
Gate Oxide Thickness
Interpoly Oxide Thickness
Gate Poly Sheet Resistance
Bottom Poly Sheet Res.
Metal-1 Sheet Resistance
Passivation Thickness
Symbol
ÏP-well(f)
ÏN+
xjN+
ÏP+
xjP+
TGOX
TP1P2
ÏPOLY1
ÏPOLY2
ÏM1
TPASS
Minimum
3.2
16
50
44
15
20
Typical
4.8
21
0.8
80
0.7
48
60
22
30
30
200+900
Maximum
6.5
27
100
52
30
40
60
Unit
Kâ¦/
â¦/
µm
â¦/
µm
nm
nm
â¦/
â¦/
mâ¦/
nm
Comments
P-well
oxide+nit.
Capacitance
Gate Oxide
Metal-1 to Poly-1
Metal-1 to Silicon
Poly-1 to Poly-2
Symbol
COX
CM1P
CM1S
CP1P2
Minimum
0.66
0.026
0.51
Typical
0.72
0.0523
0.030
0.57
Maximum
0.78
0.034
0.63
Unit
fF/µm2
fF/µm2
fF/µm2
fF/µm2
Comments
© IMP, Inc.
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