FS1012 Datasheet, PDF (1/6 Pages) List of Unclassifed Manufacturers – FERRITE SHIELDED INDUCTORS

Gas and Liquid Flow Sensor Module
FS1012
Datasheet
Description
The FS1012 MEMS mass flow sensor module measures the flow
rate using the thermo-transfer (calorimetric) principle. The FS1012
is capable of measuring a gas or liquid medium.
The FS1012 offers key advantages over resistor-based flow
solutions. The sensor utilizes thermopile sensing, which provides
an excellent signal-to-noise ratio. The sensor comprises a “solid”
thermal isolation technology and silicon-carbide coating to protect
it from abrasive wear and provides robustness and long-term
reliability. In comparison, other sensors typically contain a fragile
membrane above an etched cavity for the thermal isolation base.
The FS1012 features the sensor fully assembled and wire-bonded
out to a 6-pin header.
Features
 Gas or liquid mediums
 Robust “solid” isolation technology
 Resistant to surface contamination
 No cavity to cause clogging
 Resistant to vibration and pressure shock
 Low power application
 Sensitive at low flow rates and differential pressure levels
 Fast response: 2ms
 Millivolt output
 Supply voltage: 3V to 5V
 Module operating temperature range: 0°C to +85°C
Typical Applications
 Process controls and monitoring
 Oil and gas leak detection
 HVAC and air control systems
 CPAP and respiratory devices
 Automotive mas air flow meter
 Liquid dispensing system
FS1012 Flow Sensor Module
Basic Application Circuits
Figure 1. Single-Ended Circuit Example
Flow Sensor
HTR1
HTR2
TP1+
+
–
TP1–
3V to 5V
Microcontroller/ASIC
Input Offset Adjustment
+
SPI
ADC
I²C
–
PWM
Gain: 20X to 100x
OFFSET
GND
Figure 2. Differential Circuit Example
Flow Sensor
HTR1
HTR2
TP1+
+
–
TP1–
TP2+
+
–
TP2–
3V to 5V
Differential Amp
+
–
Gain: 20X to 100x
Microcontroller/ASIC
SPI
ADC
I²C
PWM
GND
© 2017 Integrated Device Technology, Inc.
1
July 20, 2017