E4991A Datasheet, PDF (20/40 Pages) Agilent(Hewlett-Packard) – RF Impedance/Material Analyzer

Figure 16. Dielectric loss tangent (tanδ) accuracy vs. frequency
(at t = 0.3 mm, typical)¹
Figure 19. Permittivity (ε'_r) vs. frequency (at t = 0.3 mm, typical)
Figure 17. Dielectric loss tangent (tanδ) accuracy vs. frequency
(at t = 1 mm, typical)¹
Figure 20. Permittivity (ε'_r) vs. frequency (at t = 1 mm, typical)
Figure 18. Dielectric loss tangent (tanδ) accuracy vs. frequency
(at t = 3 mm, typical)¹
1. This graph shows only frequency dependence of Ea to simplify it.
The typical accuracy of tanδ is defined as Ea + Eb; refer to “Typical
accuracy of permittivity parameters” on page 17.
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Figure 21. Permittivity (ε'_r) vs. frequency (at t = 3 mm, typical)