N9201A Datasheet, PDF (1/4 Pages) Agilent(Hewlett-Packard) – Array Structure Parametric Test Option

Agilent N9201A
Array Structure Parametric Test Option
Technical Overview
Introduction
The decreasing size of features on
integrated circuits (45 nm and smaller)
is driving the need for new parametric
test capabilities. These capabilities
must accommodate the advanced test
structures developed for fast yield
ramp up in process integration as well
as process monitoring in semiconduc-
tor manufacturing.
High-throughput measurement of high-
volume parametric data is required to
shorten the time for ramping up the
process yield. This is accomplished by
statistically analyzing and correcting
the cause of wide range of process
performance variations across a 300
mm wafer. Advanced test structures,
addressable array test structures that
contain address decoder circuitry, and
a large number of test array elements
with fewer probing pads and silicon
area have been developed by major
semiconductor manufacturers for this
purpose.
The Agilent N9201A Parametric Test
Option offers high throughput para-
metric measurement capability for
a variety of addressable array test
structures (e.g. passive array, active
array and clocked latched active array)
with synchronized mixed operation of
DC SMUs and digital outputs. Digital
outputs (parallel, serial, or clock sig-
nals) are used for the address decoder
that is built into addressable array test
structures. This allows the selection
of the specific array element to be
measured. DC SMUs measure the DC
voltage and current parameters of
selected array elements.
The DC power source is used for
applying the power supply voltage (Vdd)
to the address decoder logic circuitry
that is built-in the addressable array
test structures.
The N9201A is able to provide a
maximum of 48 signal lines using the
extended path ports of the 4070/4080
test head. This can be any combina-
tion of available SMUs, digital outputs,
and DC power source outputs. The
signals pass through the 4070/4080
test head down to the probe card.
The N9201A is controlled by SPECS
(Semiconductor Process Evaluation
Core Software), a test shell environ-
ment for the 4070 Series and 4080
Series. The N9201A can be provided
as an upgrade for existing 4070 Series
and 4080 Series users.