S9682 Datasheet, PDF (2/2 Pages) Hamamatsu Corporation – Highly reliable photodiode for VUV detection

s Variation in sensitivity due to VUV exposure
[Typ. ArF excimer laser, 0.1 mJ/cm²/pulse, f=100 Hz, λ=193 nm, pulse width=15 ns (FWHM)]
120
100
80
S9682, S9683
60
40
CONVENTIONAL TYPE
20
0
1 × 10⁶
5 × 10⁶
NUMBER OF SHOT
s Dimensional outlines (unit: mm)
S9682
13.9 ± 0.2
12.35 ± 0.1
9.1 ± 0.1
Y
X
1 × 10⁷
KSPDB0254EA
ACTIVE AREA
5.8 × 5.8
0.085
QUARTZ WINDOW
PHOTOSENSITIVE
SURFACE
0.45
LEAD
7.5 ± 0.2
ANODE TERMINAL MARK
1.4
Center of active area relative
to center of cap
-0.485≤X≤+0.315
-0.4≤Y≤+0.4
COMMON TO CASE
Si photodiode S9682, S9683
S9683
ACTIVE AREA
10 × 10
(2 ×) 4
42.0 ± 0.3
34.0 ± 0.2
( 24.5)
WINDOW
16.0 ± 0.2
QUARTZ WINDOW (t=1.0)
PHOTOSENSITIVE
SURFACE
COMMON TO CASE
KSPDA0165EB
KSPDA0166EA
Information furnished by HAMAMATSU is believed to be reliable. However, no responsibility is assumed for possible inaccuracies or omissions.
Specifications are subject to change without notice. No patent rights are granted to any of the circuits described herein. ©2006 Hamamatsu Photonics K.K.
HAMAMATSU PHOTONICS K.K., Solid State Division
1126-1 Ichino-cho, Higashi-ku, Hamamatsu City, 435-8558 Japan, Telephone: [phone], Fax: [phone], www.hamamatsu.com
U.S.A.: Hamamatsu Corporation: 360 Foothill Road, P.O.Box 6910, Bridgewater, N.J. 08807-0910, U.S.A., Telephone: [phone], Fax: [phone]
Germany: Hamamatsu Photonics Deutschland GmbH: Arzbergerstr. 10, D-82211 Herrsching am Ammersee, Germany, Telephone: [phone], Fax: [phone]
France: Hamamatsu Photonics France S.A.R.L.: 19, Rue du Saule Trapu, Parc du Moulin de Massy, 91882 Massy Cedex, France, Telephone: [phone], Fax: [phone]
United Kingdom: Hamamatsu Photonics UK Limited: 2 Howard Court, 10 Tewin Road, Welwyn Garden City, Hertfordshire AL7 1BW, United Kingdom, Telephone: [phone], Fax: [phone]
North Europe: Hamamatsu Photonics Norden AB: Smidesvägen 12, SE-171 41 Solna, Sweden, Telephone: [phone], Fax: [phone]
Italy: Hamamatsu Photonics Italia S.R.L.: Strada della Moia, 1/E, 20020 Arese, (Milano), Italy, Telephone: [phone], Fax: [phone]
Cat. No. KSPD1069E02
2
Feb. 2006 DN