S10043_15 Datasheet, PDF (1/3 Pages) Hamamatsu Corporation – Si photodiode

Si photodiode
S10043
Highly reliable photodiode for VUV detection
The S10043 is a Si photodiode designed to detect high-power ArF excimer lasers (193 nm) with high accuracy and stability. By
combining our newly developed technologies for forming ultra-thin PN junctions and high-reliability ultra-thin metal films, the
S10043 shows almost no change in sensitivity even after exposure to ArF excimer laser beam of 1 kJ/cm².
Features
Greatly improved sensitivity stability even after expo-
sure to ArF (λ=193 nm) excimer laser
Windowless package*¹
Applications
ArF excimer laser detection
Various UV detection
Absolute maximum ratings (Ta=25 °C)
Parameter
Symbol
Value
Unit
Reverse voltage
Operating temperature*²
Storage temperature*²
VR max
Topr
Tstg
5
V
-20 to +60
°C
-55 to +80
°C
*1: The S10043 uses a windowless package with no protection on the photodiode chip, and is shipped with the package held with glass
tape. Remove the glass tape when using.
*2: No dew condensation
When there is a temperature difference between a product and the surrounding area in high humidity environment, dew condensation
may occur on the product surface. Dew condensation on the product may cause deterioration in characteristics and reliability.
Note: Exceeding the absolute maximum ratings even momentarily may cause a drop in product quality. Always be sure to use the
product within the absolute maximum ratings.
Electrical and optical characteristics (Ta=25 °C)
Parameter
Symbol
Condition
Min.
Spectral response range λ
-
Peak sensitivity wavelength λp
-
Photosensitivity
S λ=193 nm
10
Dark current
ID VR=10 mV
-
Terminal capacitance Ct VR=0 V, f=10 kHz
-
Rise time
tr
VR=0 V, RL=1 kΩ
10 to 90%
-
Typ.
190 to 1000
720
15
0.1
4
9
Max.
-
-
-
1
-
-
Unit
nm
nm
mA/W
nA
nF
μs
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