L12542_15 Datasheet, PDF (1/4 Pages) Hamamatsu Corporation – Ideal for eliminating electrostatic charges in a vacuum

ELECTROSTATIC
REMOVER
ELECTROSTATIC CHARGE REMOVER
L12542
Ideal for eliminating electrostatic charges in a vacuum
OVERVIEW
The L12542 is a newly developed electrostatic charge re-
mover that makes use of VUV (vacuum ultraviolet) light.
Due to its wide irradiation angle about 3 times larger than
our current VUV light source, the L12542 efficiently re-
moves electrostatic charges over large areas in depressu-
rized or vacuum environments.
Up until now two or more VUV light sources were needed
to neutralize electrostatic charges in large areas due to
their limited irradiation angle. The L12542 solves this prob-
lem and efficiently neutralizes large areas in a vacuum.
Left: Light source, Right: Power supply
FEATURES
GLarge irradiation (neutralizing) area
GHighly efficient ion generation in a vacuum
GNo air flow needed
GNo overshoot (generates no opposite-polari-
ty static charges)
GNo dust and electromagnetic noise emissions
GLong life
APPLICATIONS
GDechucking of electrostatic chucks
GSemiconductor manufacturing equipment
(vacuum process)
GLCD manufacturing equipment
GOrganic EL manufacturing equipment
GHard disk manufacturing equipment
GFilm manufacturing equipment
Irradiating area
about 9 times
larger
WAFER
VACUUM CHAMBER
VACUUM FLANGE
ELECTROSTATIC
CHUCK
WAFER
L12542
VACUUM CHAMBER
VACUUM FLANGE
ELECTROSTATIC
CHUCK
CONVENTIONAL
TYPE
TLSZC0015EB