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L10366_15 Datasheet, PDF (1/4 Pages) Hamamatsu Corporation – HIGH BRIGHTNESS VUV LIGHT SOURCE UNIT
VUV HIGH BRIGHTNESS
LIGHT VUV LIGHT SOURCE UNIT
SOURCE L10366 SERIES
OVERVIEW
The L10366 series are newly developed VUV (va-
cuum UV) light source units.
This product uses a "high-brightness deuterium lamp
with MgF2 window" that produces a high radiant in-
tensity 4 times higher than conventional model.
This product is now a lot easier to handle due to use
of an air-cooled structure and vacuum flange mount.
FEATURES
GHigh Radiant Intensity: 4 Times
(compared to conventional model)
GHigh VUV Intensity Down to 115 nm
GAir Cooling (needs no cooling water)
GExternal Control
(lamp ON/OFF, lamp ON status signal)
GNo Optical Axis Alignment Required
ARC DISTRIBUTION (at 230 nm)
L10366 series
(Aperture size: 0.5 mm)
High Radiant Intensity
x4
(compared to conventional model)
Left: Power supply, Right: Light source
TLSZF0004
APPLICATIONS
GSpectrophotometer, Fluorophotometer
GElectrostatic Removal of Semiconductor*
Wafer, LCD Panel, etc.
GPhotoionization Detector (PID)
GUV Resistance Testing of Various Material
GOptical Chemical Vapor Deposition
(optical CVD)
GExcitation Light Source
Conventional type
(Aperture size: 1 mm)