L10366 Datasheet, PDF (1/4 Pages) Hamamatsu Corporation – HIGH BRIGHTNESS VUV LIGHT SOURCE UNIT

HIGH BRIGHTNESS
NEW VUV LIGHT SOURCE UNIT
L10366 SERIES
OVERVIEW
The L10366 series are newly developed VUV (va-
cuum UV) light source units.
This product uses a "high-brightness deuterium lamp
with MgF₂ window" that produces a high radiant in-
tensity 4 times higher than conventional model.
This product is now a lot easier to handle due to use
of an air-cooled structure and vacuum flange mount.
FEATURES
GHigh Radiant Intensity: 4 Times
(compared to conventional model)
GHigh VUV Intensity Down to 115 nm
GAir Cooling (needs no cooling water)
GExternal Control
(lamp ON/OFF, lamp ON status signal)
GNo Optical Axis Alignment Required
ARC DISTRIBUTION (at 230 nm)
L10366 series
(Aperture size: 0.5 mm)
High Radiant Intensity
x4
(compared to conventional model)
Left: Power supply, Right: Light source
TLSOF0184
APPLICATIONS
GSpectrophotometer, Fluorophotometer
GElectrostatic Removal of Semiconductor
Wafer, LCD Panel, etc.
GPhotoionization Detector (PID)
GUV Resistance Testing of Various Material
GOptical Chemical Vapor Deposition
(optical CVD)
GExcitation Light Source
Conventional type
(Aperture size: 1 mm)