C8000-30 Datasheet, PDF (1/2 Pages) Hamamatsu Corporation – High-sensitivity imaging from UV to nearinfrared wavelengths

BT-CCD Camera
C8000-30
Back-Thinned CCD Camera
C8000-30
The C8000-30 employs an ultrahigh-sensitivity back-thinned
CCD sensor made by Hamamatsu, which offers extremely
high quantum efficiency in a wide range of UV, VIS and NIR
wavelengths. The high UV sensitivity from 120 nm is useful
for semiconductor mask inspection and measurement
applications. Also, the high NIR sensitivity is useful for
fluorescence measurement, NIR LD measurement and so on.
SPECTRAL RESPONSE
100
80
60
FEATURES
High-sensitivity imaging from UV to near-
infrared wavelengths
- UV: Quantum efficiency over 60 % (at 200 nm)
- Near-infrared: Quantum efficiency over 90 % (at 650 nm)
Quantum efficiency in UV source (reference data)
(This is typical, not guaranteed.)
Light source
F2
ArF
KrF
Fourth harmonic generation
of a YAG laser
i line
Wavelength (nm)
157 193 248
266
365
Quantum efficiency (%) (typ.) 84 57 69
50
47
*
UV light irradiation
CCD sensor.
may
cause
a
drop
in
sensitivity
and
increase
the
dark
current
of
the
Real time background subtraction
Recursive filter (2, 4, 8, 16, 32 and 64 frames selectable)
PPRRIINNCCIIPPLLEE
In a normal CCD with front-illuminated CCD structure, the light
sensitive pixels have a charge transfer function as well, and this
function requires the front surface of light sensitive pixels to be
covered by a semi-transparent Poly-Si electrode for the charge
transfer function. The Poly-Si electrode absorbs some percentage
of incoming photons depending on their wavelength. Especially of
of the UV light is not able to reach the light sensitive pixels.
To overcome this disadvantage, in a back-thinned CCD, the CCD
is turned upside down and this back side of the CCD is thinned to
10-15 μm in thickness. Incident photons now enter the CCD from
the back-thinned side, without the Poly-Si electrode in the light
path. Then QE values of greater than 90 % can be achieved.
40
20
0 ₂₀₀
400
600
800 1000 1200
Wavelength (nm)
* Without sapphire window. With the sapphire window, the spectral response
is decreased due to the transmittance characteristics of the window.
Normal CCD
(Front-Illuminated CCD)
Light
sensitive
pixels
Light


e^

Gate
electrodes
Back-Thinned CCD
Light
sensitive
pixels
Light
e^F
^

Gate electrodes
SYSTEM CONFIGURATION
Lens
C8000-30
Computer frame grabber board
Video camera
Microscope microscope attachment
"
108&3
"$
"%"1503
)"."."546
A3472-06
Computer
Standard
Options