MPX5999D Datasheet, PDF (1/8 Pages) Motorola, Inc – X-ducer SILICON PRESSURE SENSORS

Freescale Semiconductor
Technical Data
MPX5999D
Rev 5, 05/2005
Integrated Silicon Pressure Sensor
On-Chip Signal Conditioned,
Temperature Compensated and
Calibrated
The MPX5999D piezoresistive transducer is a state-of-the-art pressure
sensor designed for a wide range of applications, but particularly for those
employing a microcontroller or microprocessor with A/D inputs. This patented,
single element transducer combines advanced micromachining techniques, thin-
film metallization and bipolar semiconductor processing to provide an accurate,
high level analog output signal that is proportional to applied pressure.
Figure 1 shows a block diagram of the internal circuitry integrated on the
stand-alone sensing chip.
Features
• Temperature Compensated Over 0 to 85°C
• Ideally Suited for Microprocessor or Microcontroller-Based Systems
• Patented Silicon Shear Stress Strain Gauge
• Durable Epoxy Unibody Element
MPX5999D
SERIES
INTEGRATED
PRESSURE SENSOR
0 to 1000 kPa (0 to 150 psi)
0.2 to 4.7 V OUTPUT
MPX5999D
CASE 867-08
ORDERING INFORMATION⁽¹⁾
Device
Type
Basic Element
Options
Differential
Case
Type
MPX Series
Order Number Device Marking
867 MPX5999D
MPX5999D
1. The MPX5999D pressure sensor is available as an element only.
PIN NUMBERS
1
V_out
4
N/C
2
GND
5
N/C
3
V_S
6
N/C
NOTE: Pins 4, 5, and 6 are internal device
connections. Do not connect to external
circuitry or ground. Pin 1 is noted by the
notch in the lead.
V_S
Sensing
Element
Thin Film
Temperature
Compensation
and
Gain Stage #1
Gain Stage #2
and
Ground
V_out
Reference
Shift Circuitry
Pins 4, 5, and 6 are NO CONNECTS
GND
Figure 1. Fully Integrated Pressure Sensor Schematic
© Freescale Semiconductor, Inc., 2005. All rights reserved.