SFM5400 Datasheet, PDF (4/12 Pages) –

CMOSens^ SFC5400 / SFM5400 Mass Flow Controller / Meter for Gases
1.1 Accuracy
Figure 4 compares the set point accuracy of a
conventional mass flow controller / meter with a
CMOSens SFC5400 / SFM5400. Typically, an
accuracy of 1% FS (full scale) is stated for mass flow
controllers using conventional sensor technology. The
graph shows this in relation to the accuracy of the
SFC5400 mass flow controller. It can be seen that
especially at low flow rates the CMOSens
technology reaches superior performance.
1.3 Settling time
The CMOSens SFC5400 mass flow controller has
an ultra-fast settling time. Figure 6 shows the typical
response time of the SFC5400 in comparison to a
mass flow controller using conventional sensor
technology.
Figure 4: Accuracy comparison of the CMOSens®
SFC5400 / SFM5400 device compared to a typical thermal
mass flow controller / meter.
1.2 Repeatability
Figure 5: Repeatability comparison of the CMOSens®
SFC5400 / SFM5400 device compared to a typical thermal
mass flow controller / meter.
Figure 6: Settling time of the SFC5400 vs. typical thermal
mass flow controller.
1.4 Wide control range
Ultra-wide control range of the SFC5400 brings a
decisive benefit in applications with a wide dynamic
range of gas flows. Instead of two devices used for
high flow and low flow ranges, a single SFC5400
device can efficiently cover a flow range of three
orders of magnitude.
1.5 Multiple gases, ranges & gas recognition
For large OEM projects, the new SFC5400 /
SFM5400 can be equipped with multigas feature
allowing switching between a set of gas calibrations
saved in the device memory. Similarly, different
ranges for the same gas can be stored. Another
interesting OEM feature is gas recognition. It allows
performing a check whether the activated gas
calibration matches the media in the gas line. This is
a safety feature which prevents wrong operation due
to mistake of user etc.
www.sensirion.com
October 2016 – V12
4/12