SM5102 Datasheet, PDF (2/2 Pages) List of Unclassifed Manufacturers – OEM Silicon Pressure Die

SM5102
CHARACTERISTICS FOR SM5102 - SPECIFICATIONS
All parameters are measured at 5.000V supply at room temperature, unless otherwise specified.
Min
Typ
Excitation Voltage
0
5
Excitation Current
0
1.5
Span (FS Range)
5 psi
75
100
15 psi
115
145
30 psi
130
165
60 psi
130
180
100 psi
130
200
300 psi
130
220
Offset
-50
0
TC Span
-24
-19
TC Offset
-7
-1
TC Resistance
24
27.5
Linearity
-0.3
±0.05
Bridge Impedance
2.70
3.15
Proof Pressure
3X
Burst Pressure
5X
Operating Temperature
-40
Storage Temperature
-55
Notes:
1. Bridge may be driven with positive or negative voltage
as long as Vsub is not connected. Positive output for positive pressure
applied to circuit side of die when bridge is driven with positive voltage.
2. Measured at 5V constant voltage excitation.
3. Measured from 0 to 70 C
4. Defined as best straight line.
Max
10
3
125
175
195
220
250
275
50
-15.5
+7
33
0.3
4.00
125
150
+ Sig
Units
V
mA
mV
mV
mV
mV
mV
mV
mV
%FS/100 ^oC
%FS/100 ^oC
%/100 ^oC
%FS
kohm
Rated FS
Rated FS
o_C
o_C
1.80 mm
1.38 mm
Notes
1
2
3
4
+V exc.
1.80 mm
-V exc.
Pad size =
0.12 X 0.12 mm
-V exc.
Vsub
-Sig
Positive output for pressure
applied to the top (circuit)
side of the sensor
Die dimensions in mm
ORDERING INFORMATION:
Model Number
Pressure Type
A: Absolute
G: Gage
SM5102- 015 - A
Pressure Pressure
range
Type
2.00 mm
SM5102 die (2 mm square as sawn).
Covered under USA Mask-Copyright and may be covered
under US Patent Numbers 5,812,047 and 6,089,099
See separate Application Notes for typical range of variation in Saw
dimensions.
Pressure Ranges
PSI 5102
5
005
15
015
30
030
60
060
100
100
300
300
Custom ranges available in high volumes
Notice:
Silicon Microstructures, Inc. reserves the right to make changes to the product contained in this publication. Silicon Microstructures, Inc. assumes no responsibility for the use of any
circuits described herein, conveys no license under any patent or other right, and makes no representation that the circuits are free of patent infringement. While the information in this
publication has been checked, no responsibility, however, is assumed for inaccuracies.
Silicon Microstructures, Inc. does not recommend the use of any of its products in life support applications where the failure or malfunction of the product can reasonably be expected to
cause failure of a life-support system or to significantly affect its safety or effectiveness. Products are not authorized for use in such applications.
Rev 1.2 8_02
 2001-2002
Silicon Microstructures, Inc. ♦ 1701 McCarthy Blvd. ♦ Milpitas, CA 95035 USA
Tel: [phone] ♦ Fax: [phone] ♦ [e-mail] ♦ WWW.Si-Micro.Com