SFM3200-AW Datasheet, PDF (2/8 Pages) List of Unclassifed Manufacturers – Low pressure drop

1. Sensor Performance
1.1 Physical specifications¹
Parameter
Flow range
Accuracy⁵
Noise Level⁷
Accuracy Shift Due to Temperature
Variation^5,8
Resolution (14bit)
Pressure drop
Condition
span (-40 to +80) slm
span (-60 to +100) slm
span full range
offset
span <50 slm
span >50 slm
span > 100slm
offset
span
offset
span
offset
@ 60 slm
@ 100 slm
@ 200 slm
Value
-100 … +250
Typ. ³
Max ⁴
2
3
3
5
7
10
0.05
0.1
0.6
1.0
1.0
2.0
2
4.5
0.034
0.07
0.4
0.5
0.015
0.02
0.07
0.04
100 / 0.41
150 / 0.62
250 / 0.81
300 / 0.97
750 / 3.02
1100 / 4.44
Unit
slm²
% m.v.⁶
slm²
% m.v⁶
% m.v⁶
slm²
% m.v./10˚C
slm/10˚C
% m.v. ⁶
slm²
Pa / inH2O
1.2 Ambient Conditions
Parameter
Condition
Value
Unit
T(environment)=T(gas)
Calibrated Temperature Range
+10 … +50
°C
15% rel. hum.
Operating Temperature Range
10-95% rel. hum. (non cond.)
+10 … +50
°C
Storage Temperature
10-95% rel. hum. (non cond.)
-25 … +65
°C
Operating Pressure Range
absolute
0.66 – 1.07
bar
Burst Overpressure
gauge
0.25
bar
1 _{Unless otherwise noted, all sensor specifications are valid at 25°C with Vdd = 5V and absolute pressure = 966 mbar and}
horizontal flow.
2 _{slm: mass flow measured in liters per minute at standard conditions (T = 20 °C, p = 1013.25 mbar)}
3 _{for "Typ" a CpK of 0.67 is targeted (95% of sensors within the Typ limit)}
4 _{for "Max" no sensor measured outside of this limits will be shipped and a CpK of 1.33 is targeted}
5 _{Total accuracy/repeatability is a sum of zero-point and span accuracy/repeatability.}
6 _{%m.v. = % measured value = % of reading}
7 _{noise level defined as standard deviation of individual sensor readings, measured at full sampling rate (typ: average of noise}
level ; max: at least 99.99% of sensors have a noise level below indicated value)
8 _{these effects need to be added to the initial values if applicable}
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Version 0.5 –December 2015
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