TS105-1 Datasheet, PDF (1/2 Pages) List of Unclassifed Manufacturers – Thermosensors

Thermosensors
TS105-1 / TS105-2
THERMOPILES are used for non-contact surface temperature measuring.
Any object emits infrared radiation. The radiation power is increasing with growing surface temperatures.
Based on this relation, THERMOPILES measure the emitted power and determine the object’s temperature
precisely.
Function Principle
THERMOPILES are based on the Seebeck effect, which is used since a long time for conventional
thermocouples. The application of micromechanics and thin film technology allows the production of
miniaturized and cost effective sensor elements.
absorption area
(hot junctions)
SiNx-membrane
silicon substrate
(cold junctions)
A multitude of thermojunctions deposited on a silicon substrate is connected in series to form a
THERMOPILE. The hot junctions are thermally insulated from the cold junctions on the substrate by etching a
self-supporting extremly thin membrane. An absorbing layer on the hot junctions transforms the incoming
radiation into heat. A voltage proportional to the radiation is generated by the thermoelectric effect. The
sensors are delivered in TO5-packages. Different housings and filter types can be selected to find an optimal
solution for each application. Chips without housing are available as well.
Technical Data
Parameter
Number of thermojunctions
Material
Active Area
Chip Size
Resistance of Thermopiles
TC of resistance
Sensitivity of sensor
TC of sensitivity
Specific detectivity
Noise equivalent power
Noise voltage
Time constant
Operation temperature
Storage temperature
Symbol
Unit
n
AA
AC
R
TCR
SC
TCS
D*
NEP
UN
t63
T
T
mm²
mm²
kΩ
%/K
V/W
%/K
cm*Hz^1/2 / W
nW
nV / Hz^1/2
ms
°C
°C
Value
100
BiSb, NiCr
0.7 * 0,7
2.0 * 2.0
50 ± 15
-0.03 ± 0.02
typical 110
-0.52 ± 0.08
2.1 * 10⁸
0.35
37
40 ± 10
-20 ... 100
-40 ... 100
Condition
25 °C
+25...+75 °C
25°C, 500 K, DC
+25...+75 °C
500 K, DC
500 K, 1 Hz
500 K, 1 Hz
500 K, 1 Hz
Reference Resistor
Resistance
RNi
Ω 1000 ± 0.4%
0 °C
TC of resistance
TCRNi
ppm / K 6178 ± 1%
0 °C...100 °C
Function: R(T) = 1000Ω + 6,17*T*Ω, for detailled information see data sheet of reference resistor
Filter
100
90
80
70
60
50
40
30
20
10
0
4 5 6 7 8 9 10 11 12 13 14
Wavelength (um)
Sensors in thin film technology
HL-Planartechnik GmbH
Hauert 13 44 227 Dortmund Tel.: ++49 / (0)231 / 97400 Fax.: ++49 / (0)231 / 974020
105_12_e_01
March 1999