SFM4100 Datasheet, PDF (1/9 Pages) List of Unclassifed Manufacturers – Calibrated and temperature compensated

SFM4100 Series
Low-cost Digital Mass Flow Meter for Gases
 Accuracy 3% m.v.
 Digital output (I²C)
 Multigas option available
 Calibrated and temperature compensated
 Excellent long-term stability
 Downmount or legris carstick fittings
Product Summary
The SFM4100 gas flow meter series is designed as a
versatile OEM gas flow meter for demanding volume
applications.
The SFM4100 is designed to measure Air and non-
aggressive gases with excellent accuracy over a large
dynamic range. Mass flows ranges up to 20 slm are
available. The SFM4100 series operates with supply
voltage 5-9 VDC and through its digital I2C interface it can
be easily embedded into a microprocessor environment.
The sturdy design of the SFM4100 sensor allows for
operation pressures up to 10 barg. The flow signal is
internally lineralized and temperature compensated.
The outstanding performance of these sensors is based
on Sensirion’s patented CMOSens^® sensor technology,
which combines the sensor element, signal processing
and digital calibration on a single microchip. The mass
flow is measured by a thermal method on the MEMS
sensor element. Compared to other thermal mass flow
sensors (MEMS, hotwire or capillary type) the SFM4100
features an extended dynamic range, higher long-term
stability, and improved repeatability.
The well-proven CMOS technology is perfectly suited for
high-quality mass production and is the ideal choice for
demanding and cost-sensitive OEM applications.
Applications
 Medical (e.g. respiratory care, anesthesia)
 Analytical Instruments
 Leak testing
 Process automation
Connection diagram
C
(master)
VDD
VDD=3.5-9V
VLS=2.9-5.5V
SDA
SCK _GND
SFM4100 series with bidirectional digital communication
(I²C bus)
Sensor chip
The SFM4100 series features a fourth-generation silicon
sensor chip called SF04. In addition to a thermal mass
flow sensor element, the chip contains an amplifier, A/D
converter, EEPROM memory, digital signal processing
circuitry, and interface. The highly sensitive chip is
particularly sensitive at lowest flows, giving the SFM4100
sensor its large dynamic range.
SFM4100 OEM options
A variety of custom options such as other analog output,
different gases, flow ranges, multigas calibration can be
implemented for high-volume OEM applications
(>1000pc/y). Ask us for more information.
www.sensirion.com
Version 1.3 – January 2013
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