SFM3200 Datasheet, PDF (1/7 Pages) List of Unclassifed Manufacturers – Superior performance at very low flows

Data Sheet – SFM3200
Digital Flow Meter for medical applications
 Superior performance at very low flows
 Low pressure drop
 Inspiratory flow sensor
 Flow range: up to 250 slm
Product Summary
The SFM3200 sensor is Sensirion’s digital flow meter
designed for high-volume applications. The SFM3200
measures the flow rate of air, oxygen and other non-
aggressive gases with superb accuracy. A special design
of the flow channel results in the very low pressure drop
through the flow body of the sensor making it extremely
suitable for medical ventilation and respiratory applications.
The SFM3200 is designed to be resilient to rough handling
and performs reliably at variable inlet conditions. The
outstanding performance of these sensors is based on
Sensirion’s patented CMOSens^® sensor technology,
which combines the sensor element, signal processing
and digital calibration on a single microchip. The flow rate
of a gas is measured by a thermal sensor element which
assures very fast signal processing time and
bidirectional measurement mode with best in class
accuracy. The signal is internally linearized and
temperature compensated.
The well-proven CMOS technology is perfectly suited for
high-quality mass production and is the ideal choice for
demanding and cost-sensitive OEM applications.
Applications
 Ventilation
 Anesthesia
 Respiratory measurements
 Inspiratory flow measurement
 Drug delivery
OEM options
A variety of custom options can be implemented for high-
volume OEM applications (custom flow rates, calibration
for other gases, different body form factor etc.).
For a reusable version of this sensor see the SFM3200-
AW datasheet.
Contact us for more information.
Sensor chip
The SFM3200 flow meter features a fifth-generation silicon
sensor chip. In addition to a thermal mass flow sensor
element, the chip contains an amplifier, A/D converter,
EEPROM memory, digital signal processing circuitry, and
interface. Due to seamless integration of signal acquisition
and processing on the single silicon die significant
performance and cost benefits are achieved.
www.sensirion.com
Version 1 –July 2016
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