SFM3000 Datasheet, PDF (1/7 Pages) List of Unclassifed Manufacturers – Fully calibrated & temperature compensated

Datasheet SFM3000
Low Pressure Drop Digital Flow Meter
 Low pressure drop
 Flow range: +/- 200 slm (bidirectional)
 Accuracy 1.5% m.v. (typical)
 Very fast update time (0.5ms)
 Fully calibrated & temperature compensated
 Zero offset, no drift
Product Summary
The SFM3000 sensor is Sensirion’s digital flow meter
designed for high-volume applications. It measures the flow
rate of air, oxygen and other non-aggressive gases with
superb accuracy. A special design of the flow channel
results in the very low pressure drop through the flow body
of the sensor making it extremely suitable for very
demanding applications, such as medical ventilation and
respiratory applications.
The SFM3000 operates from a 5 Volt supply voltage and
features a digital 2-wire I²C interface. The measurement
results are internally linearized and temperature
compensated.
The outstanding performance of this sensor is based on
Sensirion’s patented CMOSens^® sensor technology,
which combines the sensor element, signal processing
and digital calibration on a single microchip. The flow rate
of the gas is measured by a thermal sensor element which
assures very fast signal processing time and bi-
directional measurement with best-in-class accuracy.
The well-proven CMOS technology is perfectly suited for
high-quality mass production and is the ideal choice for
demanding and cost-sensitive OEM applications.
Applications
 Medical
 Process automation
 Burner control
 Fuel cell control
 Spectroscopy
 Environment monitoring
 Laboratory
OEM options
A variety of custom options can be implemented for high-
volume OEM applications (custom flow rates, calibration
for other gases, different body form factor etc.). Contact us
for more information.
Sensor chip
The SFM3000 flow meter features a fifth-generation silicon
sensor chip SF05. In addition to a thermal mass flow
sensor element, the chip contains an amplifier, A/D
converter, EEPROM memory, digital signal processing
circuitry, and interface. Due to seamless integration of
signal acquisition and processing on the single silicon die
significant performance and cost benefits are achieved.
Connection diagram
VDD
5V
Micro
controller
(master)
SDA
SCL
SFM3000
(slave)
GND
SFM3000 with bidirectional digital communication (I²C bus)
www.sensirion.com
Version 2 – February 2014
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