SFC5400 Datasheet, PDF (1/12 Pages) List of Unclassifed Manufacturers – Ultra-fast settling time (down to 50 ms)

Datasheet SFC5400 / SFM5400 mass flow controller / meter for gases
Product Information October 2016 – V12
 Ultra-fast settling time (down to 50 ms)
 Excellent accuracy/repeatability (0.8% / 0.1% of setpoint respectively)
 Wide control range (1000:1)
 Broad choice of interfaces: RS485, DeviceNet, IO-Link and analog voltage / current
 Broad choice of connectors: Downmount, Swagelok, VCR, VCO, Legris, C-Seal, W-Seal
 Multiple gases and gas recognition
 NIST traceable calibration
 MTBF 169 years
SFM5400
SFC5400
Unsurpassed CMOSens® Technology
The SFC5400 / SFM5400 series continues the Sensirion
pioneering work in MEMS-based mass flow controllers
and meters: The heart of this product is the unsurpassed
Sensirion CMOSens® technology. It combines a high
precision sensor element with state of the art signal
processing on a single chip and thereby providing an
accurately calibrated and temperature compensated
signal (see Figure 1). Thanks to this sensor technology,
the SFC5400 achieves unmatched ratings for speed,
accuracy and repeatability at very attractive system cost.
In addition, no recalibration is needed due to the inherent
longterm stability of the CMOSens® technology.
The SFC5400 offers fastest settling time, high control
range as well as high flexibility regarding mechanical
connectors and communication interfaces. Digital
versions also provide optional smart features like
multiple gases and ranges, gas recognition and self-test
capability.
The SFM5400 is the valve-free flow meter based on the
SFC5400 mass flow controller. It features the same
performance advantages and configurations as the MFC
counterpart without providing the controller functionality.
The brilliant performance of the SFC5400 / SFM5400
products makes them the best choice for a wide range of
applications, such as analytical instrumentation,
coating/etching equipment, medical equipment and
general process automation to name a few.
Figure 1: CMOSens® flow sensor diagram.
www.sensirion.com
October 2016 – V12
1/12