SFC4000 Datasheet, PDF (1/15 Pages) List of Unclassifed Manufacturers – CMOSens technology

SFC4000
Ultra-Fast CMOSens^ Mass Flow Controller for Gases
− High accuracy Mass Flow Controller (0.8% of set point for 10 – 100% FS)
− Ultra fast settling time (<100ms to within 2% of setpoint)
− CMOSens technology
− Analog interface (0-5Vdc)
− Unipolar Power Supply (14 to 24 Vdc)
− Down-mount, VCR, VCO fittings
− Digitally calibrated & temperature compensated
− NIST traceable calibration
Product Information January 2012 – v2.6
Swagelok fittings
Downmount fittings
CMOSens^ SFC4000 Product Summary
The CMOSens^ SFC4000 mass flow controller enables
the very fast and accurate control of gas flows over a
very wide range. Its leading performance is based on
Sensirion’s unsurpassed CMOSens^® sensor technology
which combines a high precision sensor element with the
amplification and A/D converter circuit on one single
CMOS chip. The digital calibrated and temperature
compensated sensor signal is converted directly on the
CMOSens^ chip into a PWM signal which is used in a
fast analog controlling circuit to control the valve. This
results in very high accuracy, fast settling time and large
dynamic range.
The CMOSens^ sensor is packed in a vacuum tight
stainless steel package which is mounted on a rugged
aluminum housing. This makes the SFC4000 mass flow
controller the best choice for a wide range of
applications, such as mass flow controlling in process
control, analytical instrumentation, medical applications,
fuel cells, as well as gas flow metrology.
The SFC4000 provides analog electrical interfaces for
input and output signals (0 – 5 V) and requires a
standard supply voltage between 14 and 24 VDC. It can
be operated at input pressures of up to 10 bar (145 psi).
The SFC4000 is the result of intensive optimizations of
the Sensirion PC1 mass flow controller. The new
SFC4000 is highly compatible to the PC1 and offers
even better specifications and a simpler power supply
concept.
www.sensirion.com
Sensirion - the sensor company