SFC3000 Datasheet, PDF (1/8 Pages) List of Unclassifed Manufacturers – High performance digital Mass Flow Controller

CMOSens^® SFC3000
Digital OEM Mass Flow Controller for Gases
− High performance digital Mass Flow Controller
− CMOSens^® technology with unbeatable price/performance ratio
− For high-volume OEM applications
− Fully digital (interface, control, calibration & temperature compensation)
− Small size, manifold mountable
− Multigas option (switchable by software)
− NIST traceable calibration
Information November 2008 - v1.6
CMOSens^® SFC3000 Product Summary
The CMOSens^® SFC3000 family offers fully digital Mass
Flow Controllers, Mass Flow Meters, and Pressure
Controllers for analytical instruments featuring an RS485
interface. Its leading performance is based on
Sensirion’s unsurpassed CMOSens^® sensor technology
which combines a high precision sensor element with the
amplification and A/D converter circuit on one single
CMOS chip. The analog sensor signal is converted
directly on the CMOSens^® chip into digital calibrated and
temperature compensated signal which is used in a
microprocessor running a sophisticated controlling
algorithm. This results in very high flexibility, ultra-high
stability and repeatability over a large dynamic range.
Different gas types and control ranges can be switched
by software, even during operation.
The SFC3000 provides a standard digital RS485
hardware interface for setting and reading flows. It
requires a standard supply voltage of +15 VDC. The
MFC can be operated at input pressures of up to 10 bar
(145 psi).
www.sensirion.com
Sensirion - the sensor company