KXR94-2353 Datasheet, PDF (1/15 Pages) List of Unclassifed Manufacturers – ± 2g Tri-axis Digital Accelerometer Specifications

± 2g Tri-axis Digital
Accelerometer Specifications
PART NUMBER:
KXR94-2353
Rev. 3
Nov-2010
Product Description
The KXR94-2353 is a Tri-axis, silicon micromachined
accelerometer with a full-scale output range of +/-2g (19.6
m/s/s). The sense element is fabricated using Kionix’s
proprietary plasma micromachining process technology.
Acceleration sensing is based on the principle of a differential
capacitance arising from acceleration-induced motion of the
sense element, which further utilizes common mode
cancellation to decrease errors from process variation,
temperature, and environmental stress. The sense element is
hermetically sealed at the wafer level by bonding a second
silicon lid wafer to the device using a glass frit. A separate
ASIC device packaged with the sense element provides signal
conditioning and self-test. The accelerometer is delivered in a
5 x 5 x 1.2 mm DFN plastic package operating from a 2.5 –
5.25V DC supply.
There are 4 factory programmable modes of operation for the KXR94:
Mode 00 – The three outputs (X, Y, Z) are read through the digital SPI interface, which is also
used to command Selftest and Standby Mode. The digital I/O pads are powered
from a separate power pin, and will interface to 1.8V logic.
Mode 01 – The three outputs (X, Y, Z) are provided on three analog output pins. The KXR94
also features an integrated 3-channel multiplexer (X, Y, Z). The Enable pin must
be high for normal operation and low for power shutdown.
Mode 10 – The three outputs (X, Y, Z) are provided on three analog output pins. The KXR94
also features an integrated 4-channel multiplexer (X, Y, Z, Aux In). The Enable
pin must be high for normal operation and low for power shutdown.
Mode 11 – The three outputs (X, Y, Z) are provided on three analog output pins. The KXR94
also features an integrated 4-channel multiplexer (X, Y, Z, Aux In). The Enable
pin must be low for normal operation and high for power shutdown.
The KXR94-2353 is factory programmed to be in MODE 00.
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