KXR94-2283 Datasheet, PDF (1/10 Pages) List of Unclassifed Manufacturers – 2g Tri-Axis Accelerometer Specifications

± 2g Tri-Axis Accelerometer
Specifications
PART NUMBER:
KXR94-2283
Rev. -
July 2009
Product Description
The KXR94-2283 is a tri-axis, silicon micromachined accelerometer with a full-scale output range of
±2g (19.6m/s²). The sense element is fabricated using Kionix’s proprietary plasma micromachining
process technology. Acceleration sensing is based on the principle of a differential capacitance
arising from acceleration-induced motion of the sense element, which further utilizes common mode
cancellation to decrease errors from process variation, temperature, and environmental stress. The
sense element is hermetically sealed at the wafer level by bonding a second silicon lid wafer to the
device using a glass frit. A separate ASIC device packaged with the sense element provides signal
conditioning and self-test. The accelerometer is delivered in a 5 x 5 x 1.2 mm DFN plastic package
operating from a 2.5 – 5.25V DC supply.
The three outputs (X, Y, Z) are provided on three analog output pins. The KXR94 also features an
integrated 4-channel multiplexer (X, Y, Z, Aux In). The Enable pin must be high for normal
operation and low for power shutdown.
Functional Diagram
X
Sensor
Self
Test ¹⁰
Y
Sensor
Z
Sensor
Vdd 8
GND 12
GND 3
Charge
Amplifier
Temp
Sensor
Charge
Amplifier
32K
1kHz ^32K
LPF
Charge
Amplifier
Oscillator
Logic
9
11
Enable NC
32K
Mux
6 75
S0 S1 Vmux
Output X
2
C2
Output Y
13
C3
Output Z
14
C4
4 Aux In
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