KXR94-1050 Datasheet, PDF (1/13 Pages) List of Unclassifed Manufacturers – 2g Tri-axis Accelerometer Specifications

± 2g Tri-axis Accelerometer
Specifications
PART NUMBER:
KXR94-1050
Rev. 2
Aug-2010
Product Description
The KXR94-1050 is a Tri-axis, silicon micromachined accelerometer with a full-scale output
range of +/-2g (19.6 m/s/s). The sense element is fabricated using Kionix’s proprietary plasma
micromachining process technology. Acceleration sensing is based on the principle of a
differential capacitance arising from acceleration-induced motion of the sense element, which
further utilizes common mode cancellation to decrease errors from process variation,
temperature, and environmental stress. The sense element is hermetically sealed at the wafer
level by bonding a second silicon lid wafer to the device using a glass frit. A separate ASIC
device packaged with the sense element provides signal conditioning and self-test. The
accelerometer is delivered in a 5 x 5 x 1.2 mm DFN plastic package operating from a 2.5 –
5.25V DC supply.
There are 4 factory programmable modes of operation for the KXR94:
Mode 00 – The three outputs (X, Y, Z) are read through the digital SPI interface, which is also
used to command Selftest and Standby Mode. The digital I/O pads are powered
from a separate power pin, and will interface to 1.8V logic.
Mode 01 – The three outputs (X, Y, Z) are provided on three analog output pins. The KXR94
also features an integrated 3-channel multiplexer (X, Y, Z). The Enable pin must
be high for normal operation and low for power shutdown.
Mode 10 – The three outputs (X, Y, Z) are provided on three analog output pins. The KXR94
also features an integrated 4-channel multiplexer (X, Y, Z, Aux In). The Enable
pin must be high for normal operation and low for power shutdown.
Mode 11 – The three outputs (X, Y, Z) are provided on three analog output pins. The KXR94
also features an integrated 4-channel multiplexer (X, Y, Z, Aux In). The Enable
pin must be low for normal operation and high for power shutdown.
The KXR94-1050 is factory programmed to be in MODE 10.
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