FC260 Datasheet, PDF (1/3 Pages) List of Unclassifed Manufacturers – Tylan FC260/FM360 Mass Flow Controllers and Flowmeters

Tylan ^®FC260/FM360
Mass Flow Controllers and Flowmeters
Low cost mass flow controllers with long-term repeatability and performance
Process Values
Designed to meet the exacting requirements of
semiconductor processes and equipment, the
Tylan FC260 and Tylan FM360 models are
premium quality elastomer-sealed mass flow
controllers and meter. These MFCs combine
proven components and techniques with
innovative concepts in both mechanical and
electrical design.
Excellent Performance
Tylan FC260 qnd FM360 mass flow controllers and
flowmeters accurately and reliably measure and
control flow rates of gases up to 200 standard liters
per minute without the need for pressure or
temperature corrections.
Product Features
Attitude Insensitive Flow Sensor
Superior Bypass Design to Operate
under Laminar Flow Conditions
Solid State Valve Assembly
Constructed of Type 316 Stainless
Steel
Laminar Flow
Product Benefits
Eliminates air convection currents inside its case without sacrificing
response speed.
Can be mounted in any position without requiring zero adjustment.
Assures accuracy over the entire range of mass flow controller.
Easily removed for range changes.
Completely compatible with reactive and corrosive materials.
Design eliminates internal dead volumes.
Eliminates the need for complex, interactive multi-point linearization
during calibration