FEDSM2000-11043 Datasheet, PDF(8/8 Page) List of Unclassifed Manufacturers – DUAL EMISSION LASER INDUCED FLUORESCENCE TECHNIQUE (DELIF) FOR OIL FILM THICKNESS AND TEMPERATURE MEASUREMENT

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FEDSM2000-11043 Datasheet, PDF (8/8 Pages) List of Unclassifed Manufacturers – DUAL EMISSION LASER INDUCED FLUORESCENCE TECHNIQUE (DELIF) FOR OIL FILM THICKNESS AND TEMPERATURE MEASUREMENT

◁

30000

25000

20000

15000

10000

5000

Tem perature

Thickness (m icrom eters)

Pyr 567

Rhod 640

Ratio

Figure 11: DELIF for temperature measurement

SUMMARY AND CONCLUSIONS

The bases for a two-dye Dual Emission Laser Induced

Fluorescence (DELIF) technique for film thickness and

temperature measurement were presented along with the basic

equations relating these scalar measurements to dye

characteristics and illumination intensity. Shown is that the

non-linearity resulting from emission reabsorption, while

detrimental to measurement of temperature, can be used to

accurately quantify film thickness. Experimental measurements

using Pyrromethene 567, Pyrromethene 650, and Rhodamine

640 demonstrate the feasibility of this technique at accurately

eliminating variations in illumination intensity to extract scalar

information.

REFERENCES

Coppeta, J., Rogers, C., Philipossian, A., Kaufman, F. B.,

1997, âCharacterizing Slurry Flow During CMP Using Laser

Induced Fluorescenceâ, Second International Chemical

Mechanical Polish Planarization for ULSI Multilevel

Interconnection Conference, Santa Clara, CA, February 1997.

Coppeta, J., Rogers, C., 1998, âDual Emission Laser

Induced Fluorescence for Direct Planar Scalar Behavior

Measurementsâ, Experiments in Fluids, Volume 25, Issue 1, pp.

1-15.

Haugland, R. P., 1999, âHandbook of Fluorescent Probes

and Research Chemicalâ, Seventh Edition, Molecular Probes.

Poll, G., Gabelli, A., Binnington, P. G., Qu, J., 1992,

âDynamic Mapping of Rotary Lip Seal Lubricant Films by

Fluorescent Image Processingâ, Proceedings, 13th International

Conference on Fluid Sealing, B. S. Nau, ed., BHRA.

Sakakibara, J., Adrian, R. J., 1999, âWhole Field

Measurement of Temperature in Water Using Two-Color Laser

Induced Fluorescenceâ, Experiments in Fluids, Volume 26,

Issue 1/2, pp. 7-15.