SM5112 Datasheet, PDF (2/2 Pages) List of Unclassifed Manufacturers – Harsh Environment Absolute Silicon Pressure Die

SM5112
CHARACTERISTICS FOR SM5112 - SPECIFICATIONS
All parameters are measured at 5.000V supply at room temperature, unless otherwise specified.
Min
Typ
Excitation Voltage
0
5
Excitation Current
0
1.5
Span (FS Range)
15 psi
75
125
30 psi
85
125
60 psi
85
125
150 psi
100
145
300 psi
100
145
Offset
-50
0
TC Span
-24
-19
TC Offset
-15
2
TC Resistance
17
26
Linearity
-0.3
Bridge Impedance
4.0
5.0
Proof Pressure
3X
Burst Pressure
5X
Operating Temperature
-40
Storage Temperature
-55
Notes:
1. Bridge may be driven with positive or negative voltage
as long as Vsub is not connected. Positive output for positive pressure
applied to bottom side of die when bridge is driven with positive voltage.
2. Measured at 5V constant voltage excitation.
3. Measured from 0 to 70 C
4. Defined as best straight line.
Max
10
3
150
150
150
195
195
50
-15.5
+15
31
0.3
6.0
125
150
Units
V
mA
mV
mV
mV
mV
mV
mV
%FS/100 ^oC
%FS/100 ^oC
%/100 ^oC
%FS
kohm
Rated FS
Rated FS
o_C
o_C
Notes
1
2
3
4
Pin Function
1
Subs
2
N/C
3
Vext+
4
Sig+
5
Gnd
6
Sig-
7
N/C
Pin-out from Left to
Right in accompanying
figure.
Cross-section of SM5112
Back port hole is 0.8 mm. Silicon is 0.4
mm; top and bottom glass is 0.5 mm
ORDERING INFORMATION:
Top view of SM5112 die
(2 mm square as sawn)
Covered under USA Mask-Copyright and may be covered
under US Patent Numbers 5,812,047 and 6,089,099
Pressure Ranges
PSI 5112
15
015
30
030
60
060
150 150
300 300
Custom ranges available in high volumes
Notice:
Silicon Microstructures, Inc. reserves the right to make changes to the product contained in this publication. Silicon Microstructures, Inc. assumes no responsibility for the use of any
circuits described herein, conveys no license under any patent or other right, and makes no representation that the circuits are free of patent infringement. While the information in this
publication has been checked, no responsibility, however, is assumed for inaccuracies.
Silicon Microstructures, Inc. does not recommend the use of any of its products in life support applications where the failure or malfunction of the product can reasonably be expected to
cause failure of a life-support system or to significantly affect its safety or effectiveness. Products are not authorized for use in such applications.
Rev 1.1 10_04
 2003
Silicon Microstructures, Inc. ♦ 1701 McCarthy Blvd. ♦ Milpitas, CA 95035 USA
Tel: [phone] ♦ Fax: [phone] ♦ sales@ si-micro.com ♦ www.si-micro.com