B58600D8010A011 Datasheet, PDF (6/8 Pages) EPCOS – Pressure sensors

Pressure sensors
C28 series
Absolute pressure sensor die
αs and βs are the linear and nonlinear temperature coefficient of the sensitivity respectively (see ¹⁵⁾).
Therefore TCV0+ and TCV0– are defined for the measurement temperature range by:
TCVo⁺ = ^{Vo (Tmax ) − Vo (25°C)}
T_max − 25°C
12) _{Full scale value FS}
TCVo ^− = ^{Vo (Tmin ) − Vo (25°C)}
T_min − 25°C
FS = V_out (p_{r max} ) − V_o
13) _{Sensitivity S}
The sensitivity is defined for a bridge voltage power supply VDD = 5 V. It can be determined by the formula:
S = ^{Vout (pr max ) − Vo}
p_{r max}
This parameter is tested for process control on samples, mounted on a TO39 base.
14) _{Nonlinearity L}
This parameter may be influenced by assembly.
The nonlinearity is measured using the endpoint method. Assuming a characteristic, this can be approximated
by a polynomial of second order, where the maximum is at px = prmax/2. The nonlinearity is defined at px = prmax/2,
using the equation:
L = ^{Vout (px ) − Vo} − ^px
V_out (p_{r max} ) − V_o p_{r max}
This parameter is tested for process control on samples, mounted on a TO39 base.
15) _{Temperature coefficient of sensitivity αS and βS:}
These parameters may be influenced by assembly.
The temperature coefficients of sensitivity are tested for design verification on samples, mounted on a TO39 base
over a reduced temperature range Tmeas,min = –20 °C to Tmeas,max = 80 °C with TR = 25 °C.
The temperature coefficients of first and second order are defined with the polynomial:
( ) ( ) ^
2_
S(T)
=S
(T
=
25°C)
¹⁺

α_S
T−25°C
+β_S
T−25°C


The coefficients αS and βS are calculated using the three measurement points of S(T) at Tmeas,min, TR and Tmeas,max.
16) _{Pressure hysteresis pHys}
The pressure hysteresis is the difference between output voltages at constant pressure and constant temperature while
applying a pressure cycle with pressure steps of pr, min, p1, p2, p3, pr,max, p3, p2, p1, pr, min:
pHys = ^{Vout,2 (pk ) − Vout,1(pk )}
FS
With k = min, 1, 2, 3, max. The pressure steps are: prmin = 0, p1 = 0.25·pr,max, p2 = 0.5·pr,max, p3 = 0.75·pr, max, pr,max.
This parameter is tested for design verification on samples, mounted on a TO39 base.
17) _{Forward diode voltage VF}
The voltage drop is measured across anode and cathode by a forward current of 47 µA.
This parameter is tested completely on a wafer (wafer level test measurement).
18) _{Temperature coefficient of forward diode voltage TCVF}
The temperature sensitivity of diode voltage drop is defined by the measured values at –20 °C and 80 °C
using the equation:
TCV_F
=
V_F (T_meas,max ) − V_F (T_meas,min )
T_meas,max − T_meas,min
With Tmeas,min = –20 °C and Tmeas,max = 80 °C and the measurement is done with a constant current of 50 µA.
The estimated temperature coefficient is also valid at temperatures between –40 °C and 135 °C.
This parameter is tested for design verification on samples, mounted on a TO39 base.
19) _{Reliability data}
For long-term stability of offset voltage LTSV0 please refer to the defined Aktiv Sensor’s standard AS100001 in chapter
“Reliability data” on the internet.
AS SEN PD
Please read Cautions and warnings and
Important notes at the end of this document.
Page 6 of 8
2009-08-03